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    Compact confocal chromatic sensors for precise displacement and thickness measurement

        Measuring ranges Resolution Linearity
    IFS2406.jpg (2 KB)) Compact confocal chromatic sensors for precise displacement and thickness measurement 2.5 - 10 mm 0.001 % F.S.O. ± 0.03 % F.S.O.
    FSO = of full scale output
     

    Details

    Measuring ranges (mm):
    2.5|10
    Linearity max. 0.75µm
    Resolution max. 0.024µm
    Distance and one-sided thickness measurement
    Small light spot
    Vacuum compatible sensor